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Description
Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas.
Gas Data
Molecular Weight 88
Specific Gravity(Air=1) 3.04
Applications
With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of
polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and
stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and
oxygen mixtures.
Specifications
| Property |
Unit |
Minimum |
Maximum |
| CF4 |
%vol |
99.999 |
-- |
| O2 |
ppmv |
-- |
1 |
| N2 |
ppmv |
-- |
4 |
| CO |
ppmv |
-- |
0.3 |
| CO2 |
ppmv |
-- |
0.5 |
| SF6 |
ppmv |
-- |
0.2 |
| H2O |
ppmv |
-- |
0.5 |
| HF |
ppmw |
-- |
0.1 |
| TFC(C2F6/CH2F2/CHF3/C3F8) |
ppmv |
-- |
1 |
 Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 Brass/ 590 Brass/ 320 Brass /DISS716
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 75-73-0
UN Number 1982
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