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Description
Halocarbon RC318, C4F8, (octafluorocyclobutane) is a nonflammable, colorless, odorless, gas
Gas Data
Molecular Weight 200.03
Specific Gravity(Air=1) 7.3
Applications
Used in combination with carbon monoxide for selective oxide etch
Specifications
| Property |
Unit |
Minimum |
Maximum |
| C4F8 |
%vol |
99.999 |
-- |
| O2 |
ppmv |
-- |
1 |
| N2 CO CO2 |
ppmv |
-- |
4 |
| H2O |
ppmv |
-- |
2 |
| HF |
ppmv |
-- |
0.1 |
| TFC |
ppmv |
-- |
2 |
Package
Cylinder Size DOT3AA 2265-47L
Valve CGA 660
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 115-25-3
UN Number 1976
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