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Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas
Gas Data
Molecular Weight 146.05
Specific Gravity(Air=1) 5.1
Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications
| Property |
Unit |
Minimum |
Maximum |
| SF6 |
%vol |
99.999 |
-- |
| O2 |
ppmv |
-- |
1 |
| N2 |
ppmv |
-- |
2 |
| CO |
ppmv |
-- |
0.1 |
| CO2 |
ppmv |
-- |
0.1 |
| CF4 |
ppmv |
-- |
0.5 |
| H2O |
ppmv |
-- |
2 |
| HF |
ppmv |
-- |
0.1 |
| THC(CH4) |
ppmv |
-- |
0.1 |
Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 / 590
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 2551-62-4
UN Number 1080
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